David Krick
David Krick
cleaning critical defects generating mask necessary ruins step
Cleaning of defects is a critical and necessary step in generating a zero-defect mask blank, because defects in the substrate become defects in the multilayer, which ruins the mask blank.
blanks cleaning deal great mask ready remains tasks work
A great deal of work still remains for getting EUV mask blanks ready for manufacturing, but our cleaning methodology has removed another barrier. We are well positioned for the tasks ahead.